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Scientific Visualization
| Issue Year: | 2017 |
| Quarter: | 3 |
| Volume: | 9 |
| Number: | 3 |
| Pages: | 28 - 41 |
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| Article Name: |
VISUALIZATION OF SUPERSMOOTH SURFACES TEXTURE BY THE METHOD OF FLICKER-NOISE SPECTROSCOPY |
| Authors: |
N.I. Kargin (Russian Federation), A.S. Gusev (Russian Federation), S.M. Ryndya (Russian Federation), A.D. Bakun (Russian Federation), A.E. Ieshkin (Russian Federation), A.A. Akovantseva (Russian Federation), P.I. Misurkin (Russian Federation), S.G. Lakeev (Russian Federation), I. Matushchenko (Russian Federation), S.F. Timashev (Russian Federation) |
| Address: |
N.I. Kargin
National Research Nuclear University MEPhI, Moscow, Russian Federation
A.S. Gusev
National Research Nuclear University MEPhI, Moscow, Russian Federation
S.M. Ryndya
National Research Nuclear University MEPhI, Moscow, Russian Federation
A.D. Bakun
National Research Nuclear University MEPhI, Moscow, Russian Federation
A.E. Ieshkin
Lomonosov Moscow State University, Moscow, , Russian Federation
A.A. Akovantseva
Institute of Photonic Technologies, Research Center of Crystallography and Photonics RAS, Moscow, , Russian Federation
P.I. Misurkin
N.N. Semenov Institute of Chemical Physics RAS, Moscow, , Russian Federation
S.G. Lakeev
Karpov Institute of Physical Chemistry, Moscow, , Russian Federation
I. Matushchenko
National Research Nuclear University MEPhI, Moscow, Russian Federation
S.F. Timashev
National Research Nuclear University MEPhI, Moscow, Russian Federation
Karpov Institute of Physical Chemistry, Moscow, Russian Federation |
| Abstract: |
A method of parameterization of supersmooth surfaces used in micro- and nanoelectronics as substrates, as well as light-reflecting elements of technical devices is proposed. The method is based on the flicker-noise spectroscopy (FNS) as the general phenomenological approach to extracting information from the chaotic temporal or spatial signals. According to FNS, the information about surface texture is contained in correlation components of the signals in different ranges of spatial frequencies - low frequency (resonance) and high-frequency, representing a sequence of different types of irregularities (spike-, jump-like, derivative discontinuities) at all levels of the hierarchy of the spatial structure of the studied systems. As the model objects, the topology of the surface of which was investigated by atomic force microscopy, the glass-ceramic samples were used before and after the ion-cluster treatment. Processing of optical glass ceramics by gas cluster ions was carried out in order to reduce the surface roughness. During the research it was determined that the ion-cluster processing at selected exposure modes leads, firstly, to the smoothing of surface defects of experimental samples as measure of which can serve the values of FNS parameters ? and Sc(L0-1), and, secondly, to its "planarization" as measure of which can serve the value of root-mean-square deviation. |
| Language: |
English |
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